Catalytic Activity of Sputtered Palladium Films For Electroless Nickel PLATING Studied Using a Quartz Crystal Microbalance

摘要

The catalytic activity of palladium films sputtered on a quartz resonator was studied using a nickel bath in which a quartz crystal microbalance was used to determine electroless plating processes. An adhesive interface between the Pd layer and the quartz surface Influenced activity. A chromium underlayer suppressed the catalytic activity of Pd film, but a gold underlayer did not. A palladium layer formed on Au a layer operated as a catalyst. The catalytic activity of Pd film on the Cr underlayer was greatly enhanced by cathodic treatment in dilute hydrochloric acid.