Experimental investigation of a capacitive blind hollow cathode discharge with central gas injection

摘要

The operating parameters and resulting plasma properties of a blind hollow cathode (BHC) discharge have been investigated. The hollow cathode was driven capacitively with a pulsed dc signal of 200 kHz in a power range between 50 and 100W at an ambient pressure of about 10 Pa. The working gas was argon, which was introduced with a ceramic capillary at different positions of the longitudinal axis of the hollow cathode with flow rates of between 30 and 1000 sccm. The current-voltage characteristics were recorded.