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Erosion of carbon arc cathodes operating in the thermo-field electron emission mode

机译:在热场电子发射模式下运行的碳弧阴极的腐蚀

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摘要

Steady-state modelling and experimental results are given on the electric arc attachment on cold carbon cathodes working at low pressure. The modelling results are compared with the case of copper cathodes and with experimental data on vacuum arc erosion characteristics for graphite materials. A region of existence of a physically meaningful solution for self-sustained operation of the steady-state cathode spot is given in the electron temperature-cathode spot plasma pressure space. A solution domain comprised between T-e approximate to 1.2-1.5 eV and p approximate to 2-45 atm corresponding to carbon surface temperatures in the range 4200-4900 K is found. Values of the local heat flux to the cathode surface are evaluated in the range 1-20 x 10(10) Wm(-2), and ratios of the various contributions to this flux and current density are given. Also given are the cathode spot radii and upper/lower limits for the erosion rate through vapourization, these being compared with experimental data. It is shown that the cathode spot pressure conditions can provide a mechanism for the control of macroparticle emission on carbon. This effect is used experimentally through cathode spot plasma confinement for the reduction of the microdroplet emission in arc sources used for diamondlike film deposition. Experimental data obtained on graphite materials are in agreement with the model-based design guidelines.
机译:在低压工作的冷碳阴极上的电弧附件上给出了稳态模型和实验结果。将模拟结果与铜阴极的情况以及石墨材料的真空电弧腐蚀特性的实验数据进行了比较。在电子温度-阴极点等离子体压力空间中,给出了对于稳态阴极点的自我维持操作具有物理意义的解决方案的存在区域。发现对应于4200-4900 K范围内的碳表面温度的介于约1.2-1.5 eV的T-e和约2-45 atm的p之间的溶液域。估计到阴极表面的局部热通量的值在1-20 x 10(10)Wm(-2)的范围内,并给出了对该热通量和电流密度的各种贡献之比。还给出了阴极斑点半径和通过汽化的腐蚀速率的上限/下限,将其与实验数据进行了比较。结果表明,阴极点压力条件可以为控制碳上的大颗粒发射提供一种机制。通过阴极点等离子体限制实验性地使用了这种效果,以减少用于类金刚石膜沉积的电弧源中的微滴发射。在石墨材料上获得的实验数据与基于模型的设计指南一致。

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