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A two-dimensional array of microplasmas generated using microwave resonators

机译:使用微波共振器产生的二维等离子阵列

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摘要

We present a novel array of microplasma sources consisting of microwave resonators arranged in a two-dimensional grid. When microwave power is supplied to one of these resonators, it is shared among the entire array. Microplasmas are generated between the end of each resonator and a ground plane resulting in a 'sheet' of plasma. The source design, results of electromagnetic modeling, and initial experimental results are described.
机译:我们提出了由微波谐振器排列在二维网格中组成的新型微等离子体源阵列。当将微波功率提供给这些谐振器之一时,整个阵列将共享微波功率。在每个谐振器的末端与接地层之间会产生微等离子体,从而形成“片状”等离子体。描述了源设计,电磁建模结果和初步实验结果。

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