Phase transformations in titanium dioxide thin films during chemical synthesis under strongly nonequilibrium conditions

摘要

This paper reports on the results of structural and optical investigations into the processes of formation of titanium dioxide (TiO2) films synthesized on a glass substrate by the molecular layering ML (ALD) method. The electron diffraction patterns, micrographs, X-ray diffraction patterns, and electronic absorption spectra measured at different stages of the film growth are presented. It is demonstrated that the process of film formation includes the formation of an amorphous layer, the formation of a coarse-grained structure containing anatase, and, finally, a gradual increase in the degree of crystallinity. A nontrivial effect is revealed, namely, the formation of crystalline rutile at a substrate temperature of 493 K.