Measurement of vibrational, gas, and rotational temperatures of H-2 (X-1 Sigma(+)(g)) in radio frequency inductive discharge plasma by multiplex coherent anti-Stokes Raman scattering spectroscopy technique

摘要

Translational, rotational, and vibrational temperatures of H-2 in radio frequency inductive discharge plasmas at pressures and power release ranges, respectively, of 0.5-8 torr and 0.5-2 W/cm(3) have been measured by using multiplex coherent anti-Stokes Raman scattering (CARS) spectroscopy. Computational codes have been developed to determine the rotational and vibrational temperatures and to analyze H-2 CARS spectrum for nonequilibrium conditions. The results show a decrease of the vibrational temperature from 4250 to 2800 K by increasing the pressure from 0.5 to 8 torr and a corresponding increase of the rotational temperature from 525 to 750 K. (C) 2005 American Institute of Physics.