Rate controlling processes in anodic bonding of boroslicate glass-to-Kovar alloy coated with Al film

摘要

The Kovar alloy disks coated with Al film were anode-bonded to the glass at temperatures of 513～713 K under the static voltage of 500 V. The kinetics of enlargement of intimate contact area between the Kovar alloy and the glass was examined, and the joint strength was determined by the shear tests. It is suggested that a critical temperature of about 663 K exists.