Control of a 6DOF Microvibration Testing Device Using Air Actuators

摘要

Microvibration control technology has been rapidly becoming important in a number of fields including superfine technology in semiconductor manufacturing and microgravity research experi- ments in space. In this paper, an active 6DOF microvibration testing device using air actuators is studied from the view point of control system design. The control system proposed in this paper consists of 3 control functions: a dual model matching controller, an on-line feedforward controller using disturbance information, and an off-line feedforward controller to generate a modified refer- ence input using experimental data. The effectiveness of the proposed control system is verified through vibration isolation and reference following experiments.