Double beam pulse laser deposition of NiMnSb thin films at ambient temperature

摘要

We have deposited highly crystalline thin films of the ferromagnetic alloy NiMnSb onto (100) silicon substrates kept at room temperature. The set-ups employed were single beam pulse laser deposition (1B-PLD) and, respectively, double beam pulse laser deposition (2B-PLD). In the case of the 2B-PLD two targets are simultaneously ablated and the two plumes overlap at a distance of 10 mm from the targets. The thin films obtained in both arrangements are crystalline, single phase and their stochiometries correspond to those of the targets. The surface morphology of films deposited by 2B-PLD is much improved in comparison with that of the films produced in 1B-PLD. The XRD spectra show crystalline, slightly oriented films. The stoichiometry of the films has been further checked by energy dispersive X-ray (EDX) analysis while the size and density of droplets were determined by scanning electron microscopy (SEM).