Scanning Probe Microscope-Quartz Crystal Microbalances Integrated System for In-Situ Study of Sensor Properties of Microamounts of Nanomaterials

摘要

Testing of scanning probe microscope (SPM)-quartz crystal microbalances (QCM) integrated system has been performed to measure the responses of tin oxide-based sensor nanomaterials on the effect of air mixtures containing hydrogen, methane, and ammonia. The change in the oscillation frequency of piezoquartz resonator with applied sensitive materials and change of the surface potential according to Kelvin probe microscopy (KPM) have been used as sensor signals.