机译:集成在微加工波导中的亚毫米波3.3位RF MEMS移相器
Micro and Nanosystems, School of Electrical Engineering, KTH Royal Institute of Technology, Stockholm, Sweden;
Jet Propulsion Laboratory, California Institute of Technology, Pasadena, CA, USA;
Jet Propulsion Laboratory, California Institute of Technology, Pasadena, CA, USA;
Jet Propulsion Laboratory, California Institute of Technology, Pasadena, CA, USA;
Jet Propulsion Laboratory, California Institute of Technology, Pasadena, CA, USA;
Jet Propulsion Laboratory, California Institute of Technology, Pasadena, CA, USA;
Micro and Nanosystems, School of Electrical Engineering, KTH Royal Institute of Technology, Stockholm, Sweden;
Actuators; Phase shifters; Micromechanical devices; Rectangular waveguides; Surface waves; Switches;
机译:用于500 GHz移相器的MEMS和微加工波导组合
机译:用于相控阵天线的集成波导的基于MEMS的移相器
机译:采用SOI层分离设计的12GHz大体积微机械加工RF-MEMS相移器
机译:集成在微加工波导中的500–600 GHz亚毫米波3.3位RF MEMS移相器
机译:使用硅微机械和混合集成微机电系统(MEMS)进行光相位调制光束控制。
机译:用于扫频OCT成像的微机械相移阵列型Mirau干涉仪:设计微加工和实验验证
机译:集成在微加工波导中的亚毫米波3.3位RF MEMS移相器