Radiation Technologies in Formation of the Condensed State of Atomic Structure in Crystal Materials (Physical Methodology for Radiation Process Development)

摘要

Physical technology processes for the formation of nano-dimensional structures and amorphous phases in metals and semiconductors are considered. In the single crystal silicon the process of amorphization may occur at excitation of its electron subsystem with heavy fragments of fission nuclei of uranium after the structure fragmentation as the result of its irradiation by the beam of accelerated electrons and light fragments of the same nuclei.