Wafer handling with ultrasound and vacuum technologies

摘要

Vacuum grippers based on the Bernoulli principle are state of the art. New approaches to wafer handling now aim to overcome the disadvantages of conventional handling systems. The solar industry, like all others, is striving constantly to maximise the throughput of its manufacturing systems. All too often, however, attention is focused exclusively on the process tools. That is actually rather short-sighted, because even the fastest equipment is dependent on the performance of the handling systems which feed the wafers - preferably smoothly, trouble-free and without placing undue stresses on the product.