Structural and Chemical Study of a-BC, a-CN, and a-BCN Thin Films Prepared by Reactive RF Sputtering *

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Structural and Chemical Study of a-BC, a-CN, and a-BCN Thin Films Prepared by Reactive RF Sputtering *

机译：反应性射频溅射制备的a-BC，a-CN和a-BCN薄膜的结构和化学研究*

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《Spectroscopy Letters》 |2008年第2期|p.57-63|共7页
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amorphous thin films; boron-carbon-nitrogen; spectroscopy; sputtering;

机译：无定形薄膜;硼碳氮光谱学溅镀;

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1. Structural and chemical study of a-BC, a-CN, and a-BCN thin films prepared by reactive RF sputtering [J] . Essafti A, Ech-Chamikh E, Azizan M Spectroscopy Letters . 2008,第2期

机译：反应射频溅射制备的a-BC，a-CN和a-BCN薄膜的结构和化学研究
2. Structural and chemical study of a-BC, a-CN, and a-BCN thin films prepared by reactive RF sputtering [J] . Essafti A, Ech-Chamikh E, Azizan M Spectroscopy Letters . 2008,第1a4期

机译：反应射频溅射制备的a-BC，a-CN和a-BCN薄膜的结构和化学研究
3. Effects of hydrogen incorporation on structural relaxation and vibrational properties of a-CN:H thin films grown by reactive sputtering [J] . G. Messina, s. Santangelo, G. Fanchini, Diamond and Related Materials . 2002,第3a6期

机译：氢掺入对反应溅射生长a-CN：H薄膜结构弛豫和振动性能的影响
4. Study of structural properties of N-doped ZnO thin film prepared by reactive gas-timing RF magnetron sputtering [C] . Thitikorn Boonkoom, Kittipong Tantisantisom, Jedsada Manyam Thailand International Nanotechnology Conference . 2016

机译：反应性气体定时RF磁控溅射制备的N掺杂ZnO薄膜结构性能研究
5. Cation Doped Titanum Dioxygen Thin Films Prepared by Reactive Sputtering: Synthesis, Characterization, and Applications for Environmental Catalysis. [D] . DeSario, Paul Anthony. 2011

机译：通过反应溅射制备的阳离子掺杂钛双氧薄膜：合成，表征和在环境催化中的应用。
6. Correlation of structural properties with energy transfer of Eu-doped ZnO thin films prepared by sol-gel process and magnetron reactive sputtering [O] . Julien Petersen, Christelle Brimont, Mathieu Gallart, -1

机译：溶胶-凝胶法和磁控反应溅射制备Eu掺杂ZnO薄膜的结构性能与能量转移的相关性
7. Structural and optical properties of Zn₁₋xCoxO thin films prepared by RF reactive sputtering technique [O] . Savchuk A.I., Stolyarchuk I.D., Stefanuk I., 2014

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Structural and Chemical Study of a-BC, a-CN, and a-BCN Thin Films Prepared by Reactive RF Sputtering *

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