DEVELOPMENT OF A POROUS CERAMIC-BASED AIR FLOAT PLATFORM FOR LARGE GLASS SUBSTRATES

摘要

An air float assembly comprising porous ceramic discs was developed for a transport system used to convey large glass substrates. We examined the correlation between inlet pressure, the rate of airflow, and the floating height of the glass. Data obtained from the experiment were included in the simulation model used to gain a deeper understanding of the distribution of pressure beneath the substrate and the means by which this is influenced by the permeability of porous materials. We determined that a permeability value of 10~(-12) is the most effective to provide adequate pressure with uniform distribution beneath the substrate. A value exceeding 10~(-12) produced insufficient outlet pressure and was unable to lift the substrate to the necessary height; whereas a value lower than 10~12 led to pressure saturation. Through analysis of simulation results, we determined the optimal degree of permeability required for the air float device to provide effective lift and thrust for the transport of large glass substrates. These results are important for the establishment of process parameters in the manufacturing of permeable ceramics.