Liquid–Metal Vertical Interconnects for Flip Chip Assembly of GaAs C-Band Power Amplifiers Onto Micro-Rectangular Coaxial Transmission Lines

摘要

Prior work has demonstrated a new process utilizing room-temperature liquid metal, Galinstan, as an interconnect material for flip-chip bonding. This interconnect forms a flexible bond between chips and carriers, and, therefore, a flip-chip assembly using this technology is much less susceptible to thermomechanical stresses. This paper applies this concept to interconnect GaAs MMIC chips to 3-D Polystrata transmission-line structures. Passive assemblies are utilized to model, test, and verify liquid–metal interconnections, giving average losses per liquid–metal transition of about 0.11 dB out to 26.5 GHz, low parasitics per transition, and demonstrated reliability after temperature cycling. A prefabricated GaAs MMIC chip is postprocessed for liquid–metal assembly. Measured results show, over the MMIC's 4.9–8.5-GHz frequency range, the system's overall reduction in gain of the MMIC is 1.4 dB or 0.7 dB per RF transition as compared with direct probing of the MMIC chip.