机译:闭环
MEMS Center, Harbin Institute of Technology, Harbin, China;
High quality factor; high-order; interface circuit; micromechanical capacitive accelerometer; sigma-delta modulator;
机译:
机译:连续-
机译:线性连续的Birnbaum重要性-
机译:A 265 V <公式甲型键=“内联”>