A Capacitive Ice Detection Microsensor

摘要

An ice detection system using a microfabricated diaphragm as the sensing element and portable capacitance detection circuitry is presented. During operation, actuation forces are applied electrostatically to cause diaphragm deformation. Accumulation of ice on the diaphragm leads to an increase in its effective stiffness. Therefore, for a given actuation voltage, the ice-covered diaphragm exhibits a smaller deflection than the corresponding ice-free diaphragm.