...
机译:谐振传感元件实现为通过流苏静电场驱动的单晶Si悬臂
Tel Aviv Univ Fac Engn Sch Mech Engn IL-69978 Tel Aviv Israel;
Tel Aviv Univ Fac Engn Sch Mech Engn IL-69978 Tel Aviv Israel;
Tel Aviv Univ Fac Engn Sch Mech Engn IL-69978 Tel Aviv Israel;
Tel Aviv Univ Fac Engn Sch Mech Engn IL-69978 Tel Aviv Israel|Tel Aviv Univ Ctr Nanosci & Nanotechnol IL-69978 Tel Aviv Israel;
Sensors; Electrostatics; Electrodes; Force; Sensitivity; Resonant frequency; Structural beams; MEMS; resonant sensor; SOI fabrication;
机译:以双稳态静电驱动悬臂为传感元件的共振加速度计的可行性研究
机译:露天环境传感微板的边缘静电场致动
机译:致动器单晶Ni-Mn-Ga各向异性孪晶微观结构中磁场分布的非均匀性研究
机译:使用微机械悬臂的共振压力感应,该悬臂由边缘静电场驱动
机译:边缘电场感应和驱动。
机译:基于微束静电场驱动的基于微波束的触觉传感器的动力学分析
机译:CmOs mEms谐振磁场传感器,具有差分静电驱动和电容传感