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首页> 外文期刊>International journal of non-linear mechanics >Feasibility study of a resonant accelerometer with bistable electrostatically actuated cantilever as a sensing element
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Feasibility study of a resonant accelerometer with bistable electrostatically actuated cantilever as a sensing element

机译:以双稳态静电驱动悬臂为传感元件的共振加速度计的可行性研究

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摘要

We report on a feasibility study of a resonant accelerometer incorporating fringing electrostatic fields actuated cantilever serving as a sensing element. Device's dynamics are described using the reduced order (RO) Galerkin and numerical finite differences (FD) models, the finite elements (FE) analysis is used for the evaluation of the electrostatic forces. The architecture of the electrodes designed to be thicker than the cantilever allows tuning of the beam behavior in a wide range, starting from linear and up to bistable responses. By choosing an appropriate value of the actuating voltage close to the bistability threshold the cantilever can be positioned in the configuration where the frequency sensitivity of the device to the electrode's deflection is enhanced while the frequency itself is higher than in the initial inactuated state. In accordance with the model results, by integrating the bistable cantilever with a proof mass, it is possible to design a highly sensitive resonant accelerometer with the state of the art performance.
机译:我们报告了共振加速度计的可行性研究,该加速度计包含边缘静电场驱动的悬臂作为传感元件。使用降阶(RO)Galerkin和数值有限差分(FD)模型描述设备的动力学,有限元(FE)分析用于评估静电力。电极的结构设计得比悬臂厚,可以从线性响应到双稳态响应,在宽范围内调节电子束的行为。通过选择接近双稳态阈值的合适的致动电压值,可以将悬臂定位在这样的配置中,在该配置中,装置对电极的偏转的频率敏感性增强,而频率本身高于初始未激活状态。根据模型结果,通过将双稳态悬臂梁与检测质量集成在一起,可以设计出具有最先进性能的高灵敏度共振加速度计。

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