Development of novel optoelectromechanical systems based on'transparent metals' PBG structures

摘要

Developed a novel smart optoelectromechanical structure,nfabricated using a multilayer, metal-dielectric photonic band gap (PBG)nstructure. We discuss innovative devices with electrically controllablenoptical properties that can be used as sensors with optical outputnsignals for applications in harsh or hostile environments (pressurensensors, micro gravimeter, or micro accelerometer) or as opticalnmodulators and optical limiters. Theoretical models of these novelndevices together with experimental prototypes have been developed, andncharacterization of the devices has been performed. Moreover,nmicroelectromechanical devices have been studied for application to thisnfield and are presented. In particular, the problem of realizing highlynsensitive accelerometers has been addressed, and it will be shown thatnthe proposed approach allows detecting displacements of a few nanometers