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机译:裂纹故障对基于压电悬臂的MEMS传感器动力学的影响
Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS, Bandar Seri Iskandar, Perak, Malaysia;
Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS, Bandar Seri Iskandar, Perak, Malaysia;
Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS, Perak, Malaysia;
Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS, Perak, Malaysia;
Sensors; Micromechanical devices; Structural beams; Silicon; Resonant frequency; Linear systems; Finite element analysis;
机译:基于悬臂的MEMS压电传感器和执行器的建模与表征
机译:基于悬臂式MEMS压电传感器和致动器的建模与表征
机译:压电-压阻耦合MEMS传感器,用于测量宽带宽和大动态范围的电场
机译:边缘裂纹对基于压电悬臂的MEMS传感器动力学的影响
机译:粘结层性能对压电传感器/执行器动态行为的影响。
机译:压电MEMS谐振器传感器的非接触式读出技术和电路
机译:分层压电传感器中不完美界面的裂纹尖端屏蔽和抗屏蔽效果