Miniature Passive Wireless Resonant Platform for Chemical Memory-Based Threshold Sensing

摘要

We present a miniature passive wireless resonant sensor and its use in a novel platform for chemical-memory-based threshold sensing. The sensors are microfabricated with polyimide passivation and utilize various customizable polymer sensor layers allowing for capacitive transduction. Sensors of ≈2 -mm3 active volume and 8-mm working distance are demonstrated, with experimental data for sensing using multiple polymers in multiple solvents. The novel design with configurable sensor layers enables a versatile platform for chemical and environmental monitoring applications.