Investigation of stability and reliability of tin oxide thin-film for integrated micro-machined gas sensor devices

摘要

The stability and reliability of SnO_2/Pt, SnO_2-Cu/Pt and SnO_2/Pt/SnO_2/Pt sensitive thin-films used for CO gas sensor device are discussed in this paper. the stability and reliability are very important for the tin dioxide-based gas sensor devices when these devices are to be integrated with standard CMOS circuitry. The drift in output voltage of tin dioxide sensing thin-film devices must be minimized. The stability in the output of the tin dioxide thin-film sensing resistor is very essential to implement reliable integrated sensor device, because a small drift in baseline led to large change in the biasing current in the subsequent signal processing circuit.