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Suppression of leakage currents in InAsSb MWIR photodiodes by chemical treatment and illumination

机译:通过化学处理和照明抑制InAsSb MWIR光电二极管中的泄漏电流

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摘要

Novel surface treatments for an InAs_(0.91)Sb_(0.09) p-n junction grown on GaSb by MOCVD are proposed and demonstrated. Exposure of the p-n junction to argon ion plasma followed by etching with tartaric acid reduces the dark currents by five orders of magnitude. An additional reduction by two orders of magnitude in the dark current is achieved by illuminating the sample with white light. A mid-wavelength infrared photodetector based on the so treated p-n junction exhibits a high zero-bias resistance-area product (R_0A) of 2.7 × 10~7 Ω cm~2 and an internal quantum efficiency of 70% at 77 K. The measured BLIP temperature is 170 K and a high detectivity value (D~* _(BLIP)) of 4.03 × 10~(11) cm Hz~(1/2) W~(-1) is observed at 3.7 μm. The surface treatment results indicate that the device performance is limited by bulk material properties.
机译:提出并证明了用GaCVD在GaSb上生长的InAs_(0.91)Sb_(0.09)p-n结的新型表面处理方法。将p-n结暴露在氩离子等离子体中,然后用酒石酸进行蚀刻,可将暗电流降低五个数量级。通过用白光照射样品,可以将暗电流进一步降低两个数量级。基于如此处理的pn结的中波长红外光电探测器在2.7 K时具有2.7×10〜7Ωcm〜2的高零偏置电阻面积积(R_0A),内部量子效率为70%。 BLIP温度为170 K,在3.7μm处观察到4.03×10〜(11)cm Hz〜(1/2)W〜(-1)的高探测值(D〜* _(BLIP))。表面处理结果表明,器件性能受到整体材料性能的限制。

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  • 来源
    《Semiconductor science and technology》 |2010年第4期|p.5.1-5.3|共3页
  • 作者单位

    Solid State Physics, Electro-Optics Division, Soreq NRC, Yavne 81800, Israel Department of Physical Electronics, School of Electrical Engineering, Tel Aviv University, Tel Aviv 69978, Israel;

    Solid State Physics, Electro-Optics Division, Soreq NRC, Yavne 81800, Israel;

    Solid State Physics, Electro-Optics Division, Soreq NRC, Yavne 81800, Israel;

    Solid State Physics, Electro-Optics Division, Soreq NRC, Yavne 81800, Israel;

    Solid State Physics, Electro-Optics Division, Soreq NRC, Yavne 81800, Israel;

    Department of Physical Electronics, School of Electrical Engineering, Tel Aviv University, Tel Aviv 69978, Israel;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
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  • 入库时间 2022-08-18 01:31:39

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