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Impact of dual field plates on drain current degradation in InAlN/AlN/GaN HEMTs

机译:双场板对InAlN / AlN / GaN HEMT中漏极电流退化的影响

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摘要

InAlN/AlN/GaN HEMTs with both source and gate dual field-plates (FPs) are proposed. To investigate the influence of dual FPs on the devices characteristics, two types of devices with gate FP and without FPs were fabricated and tested. The devices were subjected to different kinds of short-term direct current bias (DC-bias) stress conditions. The results show that after the off-state bias stress, the drain current reduction rate of the devices with dual FPs was 3.32%, which was less than that in both devices with a gate FP of 7.57% and devices without FPs of 14.63%. The current collapse of the HEMTs with dual FPs was relieved due to the increase of electric field uniformity between the gate and drain. The degradation of the output characteristics was more serious after the on-state bias stress. In addition, the effects of bias stress on the transfer characteristics of the devices were studied, and the trapping processes under different stress conditions in the devices were discussed.
机译:提出了同时具有源极和栅极双场板(FP)的InAlN / AlN / GaN HEMT。为了研究双FP对器件特性的影响,制造并测试了两种带有门FP和不带FP的器件。器件要经受不同种类的短期直流偏置(DC-bias)应力条件。结果表明,在关断状态下,具有双FP的器件的漏极电流降低率为3.32%,低于栅极FP为7.57%和无FP器件的14.63%。由于栅极和漏极之间电场均匀性的提高,具有双FP的HEMT的电流崩塌得到了缓解。在通态偏置应力作用下,输出特性的下降更为严重。此外,研究了偏压对器件传递特性的影响,并讨论了在不同应力条件下器件的俘获过程。

著录项

  • 来源
    《Semiconductor science and technology》 |2016年第12期|125003.1-125003.6|共6页
  • 作者单位

    Chinese Acad Sci, Key Lab Semicond Mat Sci, Inst Semicond, Beijing 100864, Peoples R China;

    Chinese Acad Sci, Key Lab Semicond Mat Sci, Inst Semicond, Beijing 100864, Peoples R China|Xian Univ Posts & Telecommun, Sch Elect Engn, Xian, Peoples R China;

    Chinese Acad Sci, Key Lab Semicond Mat Sci, Inst Semicond, Beijing 100864, Peoples R China;

    Chinese Acad Sci, Key Lab Semicond Mat Sci, Inst Semicond, Beijing 100864, Peoples R China;

    Chinese Acad Sci, Key Lab Semicond Mat Sci, Inst Semicond, Beijing 100864, Peoples R China;

    Chinese Acad Sci, Key Lab Semicond Mat Sci, Inst Semicond, Beijing 100864, Peoples R China;

    Xian Univ Posts & Telecommun, Sch Elect Engn, Xian, Peoples R China;

    Chinese Acad Sci, Key Lab Semicond Mat Sci, Inst Semicond, Beijing 100864, Peoples R China|Beijing Key Lab Low Dimens Semicond Mat & Devices, Beijing, Peoples R China;

    Chinese Acad Sci, Key Lab Semicond Mat Sci, Inst Semicond, Beijing 100864, Peoples R China;

    Beijing Huajin Chuangwei Technol Co Ltd, Beijing, Peoples R China;

    Chinese Acad Sci, Key Lab Semicond Mat Sci, Inst Semicond, Beijing 100864, Peoples R China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    HEMT; field plates; InAlN; GaN; electrical properties;

    机译:HEMT;场板;InAlN;GaN;电性能;
  • 入库时间 2022-08-18 01:30:00

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