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Carbon Trading and the Semiconductor Industry

机译:碳交易与半导体产业

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摘要

Over the next decade, the market for fluorinated emissions trading is estimated at $4.3B. The largest potential trading revenues are in countries with binding emissions reduction commitments under the Kyoto Protocol. For countries that don't participate in the Kyoto Protocol, emissions reduction credit levels are voluntary and lower. rnGreenhouse gas (GHG) emissions trading is being widely adopted as one of the solutions to tackle climate change. While most cap-and-trade regimes have so far been confined to carbon dioxide (CO_2)-intensive industrial sectors such as energy production, oil refineries, mineral and metal production, a significant opportunity exists for the semiconductor industry to participate in these emerging markets and mitigate emissions, while generating additional revenues through the sale of carbon credits. In particular, reducing the emissions of fluorinated compounds (FCs) from etch and CVD chamber cleaning processes can yield large amounts of credits due to the high global warming potentials (GWPs) of these gases. For example, sulfur hexafluoride (SF_6) has a GWP of 22,800; preventing emissions of 1 kg of SF_6 is equivalent to reducing emissions of 22.8 tonnes of CO_2, which would in turn generate 22.8 emissions credits.
机译:在接下来的十年中,氟化物排放交易的市场估计为$ 4.3B。潜在的最大贸易收入来自那些在《京都议定书》之下具有约束力的减排承诺的国家。对于未参加《京都议定书》的国家,减排信用额度是自愿性的且较低。 rn温室气体(GHG)排放交易已被广泛用作解决气候变化的解决方案之一。尽管到目前为止,大多数限额交易制度都局限于二氧化碳密集型工业领域,例如能源生产,炼油厂,矿产和金属生产,但半导体行业存在参与这些新兴市场的重大机会减少排放,同时通过出售碳信用额产生额外的收入。特别地,由于这些气体的高全球变暖潜能值(GWP),减少蚀刻和CVD腔室清洁工艺中的氟化物(FC)排放可产生大量信用。例如,六氟化硫(SF_6)的GWP为22,800;防止1千克SF_6的排放相当于减少22.8吨CO_2的排放,这反过来又会产生22.8排放信用。

著录项

  • 来源
    《Semiconductor International》 |2009年第4期|20-23|共4页
  • 作者

    Sebastien Raoux;

  • 作者单位

    Transcarbon International Corp.San Francisco;

  • 收录信息 美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

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