Development and Field-Scale Optimization of a Honeycomb Zeolite Rotor Concentrator/Recuperative Oxidizer for the Abatement of Volatile Organic Carbons from Semiconductor Industry

摘要

The combined concentrator/oxidizer system has been proposed as an effective physical-chemical option and proven to be a viable solution that enables Volatile Organic Carbons (VOCs) emitters to comply with the regulations. In this work, a field scale honeycomb zeolite rotor concentrator combined with a recuperative oxidizer was developed and applied for the treatment of the VOC waste gas. The research shows the following: (1) for the adsorption rotor, zeolite is a more appropriate material than Granular Activated Carbon (GAC). The designing and operation parameters of the concentrator were discussed in detail including the size and the optimal rotation speed of rotor. Also the developed rotor performance's was evaluated in the field; (2) Direct Fired Thermal Oxidizer (DFTO), Recuperative Oxidizer (RO), Regenerative Thermal Oxidizer (RTO) and Regenerative Catalytic oxidizer (RCO) are the available incinerators and the RO was selected as the oxidizer in this work; (3) The overall performance of the developed rotor/oxidizer was explored in a field scale under varying conditions; (4) The energy saving strategy was fulfilled by reducing heat loss from the oxidizer and recovering heat from the exhaust gas. Data shows mat the developed rotor/oxidizer could remove over 95% VOCs with reasonable cost and this could be helpful for similar plants when considering VOC abatement