THE RF CAPACITIVE POST DISCHARGE AS A SOURCE OF ACTIVE SPECIES

摘要

The excited species that have been generated in a RF discharge are carried out of the discharge zone using a flowing gas. The main process during plasma expansion is counted to be the recombination of the excited species leading at the end to active species such as long lived metastables and radicals. Therefore the system based on this method is expected to be suitable of using it as a source of active species. Two experimental configurations are described followed by a discussion on the measurements performed in order to answer the question if the RF field is present into the expansion zone.