DISCHARGE ELECTRODE, ACTIVE SPECIES GENERATING UNIT USING THE SAME, AND ACTIVE SPECIES GENERATING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a discharge electrode which suppresses reduction in a generation amount of an active species, and to provide an active species generating unit using the discharge electrode, and an active species generating device.;SOLUTION: A discharge electrode 15, which is a semiconductive coated needle, suppresses wear of a tip of the discharge electrode by configuring to cover a periphery of an alumina, which is a ceramic insulator 20, with a hollow cylindrical or a cap-shaped semiconductive body 21 containing an oxide conductive material 22 and glass, which is a constituent material 23, thereby an occurrence of an active species can be stabilized over time.;COPYRIGHT: (C)2013,JPO&INPIT