OPTICAL AND MASS SPECTROMETRY DIAGNOSIS OF A CO_2 MICROWAVE PLASMA DISCHARGE

摘要

The experimental results on parameters of carbon dioxide (CO_2) and CO_2 and hydrogen (H_2) gas mixture microwave plasma discharge measured by means of the emission and absorption spectroscopies as well as end products of the CO_2 plasma dissociation by means of mass spectrometry are presented. The plasma parameters were determined for different flow rates and their corresponding pressures. The optical emission spectroscopy (OES) realized with high resolution spectrophotometer gives information about species existed inside the plasma volume, while the Tunable Diode Laser Atomic Spectrometry (TDLAS) performed by Toptica DL-100 system allows the oxygen metastables density and temperature to be measured.