Dynamic thermomechanical response of bimaterial microcantilevers to periodic heating by infrared radiation

摘要

This paper investigates the dynamic thermomechanical response of bimaterial microcantilevers to periodic heating by an infrared laser operating at a wavelenegth of 10.35 μm. A model relates incident radiation, heat transfer, temperature distribution in the cantilever, and thermal expansion mismatch to find the cantilever displacement. Experiments were conducted on two custom-fabricated bimaterial cantilevers and two commercially available bimaterial microcantilevers. The cantilever response was measured as a function of the modulation frequency of the laser over the range of 0.01–30 kHz. The model and the method of cantilever displacement calibration can be applied for bimaterial cantilever with thick coating layer. The sensitivity and signal-to-noise of bimaterial cantilevers were evaluated in terms of either total incident power or incident flux. The custom-fabricated bimaterial cantilevers showed 9X or 190X sensitivity improvement compared to commercial cantilevers. The detection limit on incident flux is as small as 0.10 pW μm-2 Hz-1/2.