ALIGNMENT METHOD AND ASSOCIATE ALIGNMENT AND LITHOGRAPHIC APPARATUSES

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ALIGNMENT METHOD AND ASSOCIATE ALIGNMENT AND LITHOGRAPHIC APPARATUSES

机译：对准方法和关联对准和光刻设备

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Disclosed is a method of, and associated apparatuses for, performing a position measurement on an alignment mark comprising at least a first periodic structure having a direction of periodicity along a first direction. The method comprises obtaining signal data relating to the position measurement and fitting the signal data to determine a position value. The fitting step uses one of a modulation tit or a background envelope periodic fit.

机译：公开了一种方法和相关的装置，用于对对准标记上的位置测量执行，该对准标记包括至少第一周期性结构沿第一方向具有周期性的方向。该方法包括获取与位置测量有关的信号数据并拟合信号数据以确定位置值。拟合步骤使用调制山脊或背景信封周期性拟合之一。

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《Research Disclosure 》 |2020年第675期| 990-1003| 共14页
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1. ALIGNMENT METHOD AND ASSOCIATED ALIGNMENT AND LITHOGRAPHIC APPARATUSES [J] . Research Disclosure . 2021 ,第684期

机译：对准方法和相关对准和光刻设备
2. ALIGNMENT METHOD AND ASSOCIATED ALIGNMENT AND LITHOGRAPHIC APPARATUSES [J] . Research Disclosure . 2021 ,第684期

机译：对准方法和相关对准和光刻设备
3. SYSTEMS AND METHODS FOR MEASURING INTENSITY IN A LITHOGRAPHIC ALIGNMENT APPARATUS [J] . Research Disclosure . 2021 ,第684期

机译：用于测量光刻对准装置中的强度的系统和方法
4. A Design of Alignment System for Overlaying in Scanning Probe Lithographic Technology and Analyses of Alignment Precision [C] . Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems . 2006

机译：扫描探头光刻技术叠加系统的设计与对准精度分析
5. Advancing ontology alignment: New methods for biomedical ontology alignment using non equivalence relations. [D] . Stoutenburg, Suzette Kruger. 2009

机译：推进本体对齐：使用非等价关系的生物医学本体对齐的新方法。
6. The M-Coffee web server: a meta-method for computing multiple sequence alignments by combining alternative alignment methods [O] . Sebastien Moretti, Fabrice Armougom, Iain M. Wallace, 2007

机译：M-Coffee Web服务器：一种通过结合其他比对方法来计算多个序列比对的元方法
7. Figure 8: (A) Tree resulted standard MP analysis of 159,074 bp alignment of complete plastomes of palms (Arecales), Dasypogonales, and Typha latifolia (Poales, Typhaceae) from Barrett et al. (2016) (see their Fig. 4 and Fig. S5), a posteriori rooted relatively the cattail (Typha) (length = 66,788, CI = 0.7363, RI = 0.6109), 119,251 characters are constant, and the number of the parsimonyinformative characters is equal to 19,124; (B) the average consensus tree of the score 0.00755 resulted the analysis of the Hennigian forest of the 25,630 trees derived from the modified binary representation of the original 159,074 bp alignment of complete plastomes of palms (Arecales), Dasypogonales, and Typha latifolia (Poales, Typhaceae) from Barrett et al. (2016) (see “Materials and Methods” for the details). The cattail is assumed to be the best all-plesiomorphic group. “Additional…” FORESTER’s output tree file (see “Materials and Methods” for the details) selected for future analysis; (C) the average consensus tree of the score 0.00760 resulted the analysis of the Hennigian forest of the 25,576 trees, derived from the binary representation of the original 15,9074 bp alignment of the complete plastomes of palms (Arecales), Dasypogonales, and Typha latifolia (Poales, Typhaceae) from Barrett et al. (2016) (see “Materials and Methods” for the details), but with all of the 54 trees, which contain the clade (Cocos nucifera plus Elaeis guineensis) have been removed from the input forest before analysis. [O] . -1

机译：图8：（a）树导致标准MP分析为棕榈（槟榔树），daspophonales和Typha Latifolia（Poales，Typhaceae）的完全塑料的159,074bp对齐。来自Barrett等人。（2016）（见其图4和图4. S5），后验生根相对队伍（TYPHA）（长度= 66,788，CI = 0.7363，RI = 0.6109），119,251个字符是常数的，并且是阳离子信息特征的数量等于19,124; （b）分数的平均共识树0.00755导致25,630棵树的Hennigian森林分析来自原始的棕榈（槟榔树），daspogonal和Typha Latifolia（Poales的Typha Latifolia（Poales来自Barrett等人的Typhaceae）。（2016）（参见“材料和方法”详情）。标志着香烟是最好的全普拉西氏族。 “附加...”Forester的输出树文件（参见“用于未来分析的详细信息”的“材料和方法”; （c）评分的平均共识树0.00760导致25,576棵树的Hennigian森林的分析来自原始的Palms（槟榔的完全塑料，Daspogonal和Typha的原始塑料的二进制表示Latifolia（Poales，Typhaceae）来自Barrett等人。（2016）（参见“材料和方法”的细节），但在分析之前已经从输入森林中除去了所有54棵树（Cocos Nucifera Plus Guineensis）的所有54棵树。

ALIGNMENT METHOD AND ASSOCIATE ALIGNMENT AND LITHOGRAPHIC APPARATUSES

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