基于外参考干涉对准技术的对准系统信号处理方法

摘要

给出了基于外参考干涉对准技术的对准系统的对准原理及信号处理流程。包括：基于外参考干涉对准技术的对准系统的对准原理；电子信号处理模块主要结构；信号的处理流程和算法原理，各衍射级次信号的分离方法简述等。%This paper consists of 3 parts. A s:Introduce the principle and signal processing of an alignm entsystem thatbased on externalreferencing to the centerofsym m etry ofany m ark having one hundred and eighty degree sym m etry.Introduce the structure of electricalprocessing m odule.Introduce the signalprocessing and the principle ofthe arithm etic,and also introduce the m ethod ofseparate the signalofdiffraction orders.