Dry Exhaust Filtration Dosing

摘要

Some by-products of exhaust abatement by combustion can be in the form of deliquescent powders, phosphorus pentoxide formed from combusting the phosphine gas from phosphide MOCVD deposition processes being a good example. Such powders are difficult to remove by filtration because the absorption of moisture from the airstream exiting the combustor results in the powder becoming "damp" and the powder turning "sticky" and adhering to the filtration media. In the case of phosphorous pentoxide, the resulting concentrated phosphoric acid is also extremely corrosive, making containment and handling difficult.