Research Disclosure

摘要

An improvement on the mirrors used in high power seed modules (HPSM) of lithography tools is proposed. Currently, the mirrors in high power seed modules are aligned manually using hex keys. It is also a requirement that the personnel carrying out this alignment operation arc highly skilled. The proposed assembly improvement to HPSM provides a cost-effective way to implement mirror alignment steps by reducing the required tool downtime to implement the alignment, and also by not requiring a skilled operator for a manual alignment.