NF3 - NOx suppression in solar cell abatement

摘要

When combusting NF_3 (e.g. in a TPU, TCS or Spectra Z or G), a likely chemical reaction route will be NF_3 + H_2O → HF + NOx where x=0.5-2. The problem with NOx is that its emission levels are regulated in most countries because of its presence in automotive exhaust emissions. This is a particular issue in flat panel display (FPD) and solar cell applications.