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Diameter-dependent dopant location in silicon and germanium nanowires

机译:硅和锗纳米线中与直径有关的掺杂剂位置

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We report studies defining the diameter-dependent location of electrically active dopants in silicon (Si) and germanium (Ge) nanowires (NWs) prepared by nanocluster catalyzed vapor-liquid-solid (VLS) growth without measurable competing homogeneous decomposition and surface overcoating. The location of active dopants was assessed from electrical transport measurements before and after removal of controlled thicknesses of material from NW surfaces by low-temperature chemical oxidation and etching. These measurements show a well-defined transition from bulk-like to surface doping as the diameter is decreased <22-25 nm for n- and p-type Si NWs, although the surface dopant concentration is also enriched in the larger diameter Si NWs. Similar diameter-dependent results were also observed for n-type Ge NWs, suggesting that surface dopant segregation may be general for small diameter NWs synthesized by the VLS approach. Natural surface doping of small diameter semiconductor NWs is distinct from many top-down fabricated NWs, explains enhanced transport properties of these NWs and could yield robust properties in ultrasmall devices often dominated by random dopant fluctuations.
机译:我们报告了研究,该研究定义了纳米簇催化的气液固(VLS)生长制备的硅(Si)和锗(Ge)纳米线(NWs)中电活性掺杂剂的直径依赖性位置,而没有可衡量的均质分解和表面覆盖涂层。在通过低温化学氧化和蚀刻从NW表面去除受控厚度的材料之前和之后,通过电传输测量来评估活性掺杂剂的位置。这些测量结果表明,对于n型和p型Si NW,当直径减小<22-25 nm时,可以从块状掺杂过渡到表面掺杂,尽管表面掺杂剂浓度也随较大直径的Si NW富集。对于n型Ge NW,也观察到了类似的直径依赖性结果,这表明表面掺杂物偏析对于通过VLS方法合成的小直径NW可能是普遍的。小直径半导体NW的自然表面掺杂不同于许多自上而下制造的NW,这说明这些NW的传输特性得到了增强,并且可以在通常由随机掺杂物波动主导的超小型器件中产生强大的性能。

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