A study on residual stress of ground surface of silicon nitrides

摘要

In this paper, relationship between the residual stress in the ground surface of silicon nitrides, with various grinding conditions and the grinding factor was investigated, in order to make clear the foundamental grinding factors which affect the residual stress. Moreover the force acting on a grain cutting edge which was dynamic force in grinding was calculated, and relationship between the force acting on a grain cutting edge and the residual stress was investigated.