Fast, zero-dimensional simulation of radio frequency glow discharges for quick estimates of fluorine concentrations

摘要

A zero-dimensional model quickly estimates changes in species concentrations in CF/sub 4/ radio frequency glow discharges. The code simulated experimental conditions of 100 mtorr and 5-20 W discharges. The results show that the simple model predicts actinometry results if the most accurate electron energy distribution function is used.