METHOD OF DETECTING FLUORINE BY USE OF HIGH FREQUENCY GLOW DISCHARGE

摘要

PROBLEM TO BE SOLVED: To detect whether fluorine element is contained in a matter to be spectrally analyzed such as semiconductor product or not. ;SOLUTION: As an inert gas to be injected to a high frequency glow discharge device, neon gas is used. MgF₂ contains fluorine in a ratio of 61.3%. The graph showing the result of spectral analysis of MgF₂ (NO.1) shows that the peak of luminescent line having the largest intensity is present in 6856.02 Å, and luminescent lines are further generated in positions such as 6909.82 Å, 6902.46 Å, 6870.22 Å, 6834.26 Å, 6700 Å and the like. From this result of spectral analysis, the luminous intensity is high when fluorine is contained in large quantities to generate a pattern of large and small luminescent lines as described above. When fluorine is contained in small quantities, whether the luminescent line can be detected in 6856.01 Å having the highest intensity or not is the limit of detection sensitivity.;COPYRIGHT: (C)1998,JPO