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Local redistribution of dopants and defects induced by annealing in polycrystalline compound semiconductors

机译:多晶化合物半导体中掺杂物的局部重分布和退火引起的缺陷

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摘要

The annealing of chlorine-doped polycrystalline CdTe films leads to the occurrence of an abnormal grain structure with the formation of both primary and secondary grains, the latter being larger and growing at the expense of the former. The spatial distribution of dopants and defects has been investigated within both types of grains by time-of-flight secondary-ion-mass spectroscopy imaging and spatially resolved cathodolumines-cence. It is found that chlorine atoms similarly segregate in the vicinity of grain boundaries in both primary and secondary grains, whereas chlorine donors are homogeneously distributed away from grain boundaries. It is shown that, contrary to primary grains, secondary grains exhibit specific concentration processes around grain boundaries, such as cadmium vacancy accumulation and dislocation piling up. The existence of long-range stresses around grain boundaries only within secondary grains is also evidenced and attributed to piezoelectric effects. Grain boundaries thus act as getters for dopants and defects by draining them from the interior of secondary grains. These physical mechanisms emphasize efficient purifying effects associated with the beneficial formation and growth of secondary grains within an abnormal grain structure as induced by annealing. The depicted processes can be applied to a wide variety of polycrystalline compound semiconductors and can find direct applications in the field of solar cells based on these materials.
机译:掺氯多晶CdTe薄膜的退火会导致异常晶粒结构的发生,同时形成一次晶粒和二次晶粒,后者变大并以前者为代价生长。通过飞行时间二次离子质谱光谱成像和空间分辨阴极发光技术研究了两种晶粒中掺杂剂和缺陷的空间分布。已经发现,在一次和二次晶粒中,氯原子相似地偏析在晶界附近,而氯给体均匀地分布在远离晶界处。结果表明,与一次晶粒相反,二次晶粒在晶界周围表现出特定的集中过程,例如镉空位积累和位错堆积。仅在次生晶粒内的晶界周围仍存在长距离应力,这也得到了证明,并归因于压电效应。因此,晶界通过从次级晶粒的内部排出来充当掺杂剂和缺陷的吸收剂。这些物理机制强调了与退火引起的异常晶粒结构内次生晶粒的有益形成和生长相关的有效净化效果。所描绘的工艺可以应用于多种多晶化合物半导体,并且可以基于这些材料在太阳能电池领域找到直接的应用。

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