Tensile Strained Germanium Microstructures: A Comprehensive Analysis of Thermo-Opto-Mechanical Properties

摘要

The influence of the thermomechanical effects on the optical properties of germanium microstructures is investigated. Finite element method (FEM) calculations allow a complete spatial assessment of mechanical deformations induced by a silicon nitride (SiN) stressor layer deposited on Ge micropillars. Simulated strain maps are confirmed by experimental maps obtained by Raman spectroscopy. The theoretical investigation on strain-dependent band structure, including the presence of a strain gradient along the longitudinal direction, is exploited to fully capture photoluminescence spectroscopy experiments. Finally, the joint effect of temperature and strain on the fundamental bandgap is also quantified.