Macroporous silicon hydrogen diffusion layers for micro-fuel cells

摘要

In this study, we have demonstrated the possibility of using macroporous silicon as a hydrogen diffusion layer in integrated micro fuel cells. Macroporous silicon was used to increase an exchange surface between hydrogen and active layers of micro fuel cells. Moreover, electrochemical etching isrnan interesting alternative to costly Deep Reactive Ion Etching techniques. A maximum density power of 250 mW/cm~2 was demonstrated using conventional proton exchange membrane micro fuel cell.