Application of the electron probe microanalysis in nitride-based heterostructures investigation

摘要

The aim of this work was development of electron probe microanalysis (EPMA) technique suitable for composition determination of nanoscale layers. Proposed technique allows to determine the content of thin layers lying beneath the surface including single quantum wells (SQWs). The method is based on Monte-Carlo numerical simulations. Application of this technique to the nitride heterostructures with SQWs and multiple quantum wells (MQWs) was demonstrated. Peculiarities of the method are discussed.Electron trajectories in GaN sample with In_0.1Ga_0.9N single quantum well. Simulation was made by Monte-Carlo method.