Post annealing effects on the properties of sputtered nano-crystallite indium tin oxide thin films on flexible polyimide substrate

摘要

Indium tin oxide (ITO) thin films were deposited onto flexible polyimide substrates using RF sputtering system at room temperature. The deposited films were then heat treated at different temperatures in air and vacuum atmospheres. The structural variations and as consequence the electro-optical characteristic variations of the films were systematically in-rnvestigated as a function of post annealing temperature and atmosphere. The structure of the films was studied by means of XRD and SEM techniques and the electro-optical characteristics were measured by four point probe and spectropho-tometer, respectively.