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机译:具有二维电子气的基于AlGaN / GaN的MEMS,适用于新型传感器应用
Institute of Micro- and Nanotechnologies, Technische Universitaet Ilmenau, P.O. Box 100565, 98684 Ilmenau, Germany;
Institute of Micro- and Nanotechnologies, Technische Universitaet Ilmenau, P.O. Box 100565, 98684 Ilmenau, Germany;
Institute of Micro- and Nanotechnologies, Technische Universitaet Ilmenau, P.O. Box 100565, 98684 Ilmenau, Germany;
Institute of Micro- and Nanotechnologies, Technische Universitaet Ilmenau, P.O. Box 100565, 98684 Ilmenau, Germany;
Institute of Micro- and Nanotechnologies, Technische Universitaet Ilmenau, P.O. Box 100565, 98684 Ilmenau, Germany;
Institute of Micro- and Nanotechnologies, Technische Universitaet Ilmenau, P.O. Box 100565, 98684 Ilmenau, Germany;
Institute of Micro- and Nanotechnologies, Technische Universitaet Ilmenau, P.O. Box 100565, 98684 Ilmenau, Germany;
Institute of Micro- and Nanotechnologies, Technische Universitaet Ilmenau, P.O. Box 100565, 98684 Ilmenau, Germany;
micromechanical devices and systems; etching and cleaning; electron states at surfaces and interfaces; micro- and nano-electromechanical systems (MEMS/NEMS) and devices;
机译:通过使用基于AlGaN / GaN的金属-半导体-金属二维电子气敏电阻改善电涌保护
机译:用于GaN基光电器件的双AlGaN / GaN分布式布拉格反射器堆叠镜的设计与制造
机译:通过金属有机化学气相沉积法表征具有选择性再生长n-AlGaN的AlGaN / GaN p-n二极管及其在GaN基双极晶体管中的应用
机译:基于ALGAN / GAN的MEMS,具有二维电子气体,用于新型传感器应用
机译:微金属应用中通过金属有机气相外延生长在6H-SiC(0001)衬底上的GaN和AlGaN的生长,掺杂和表征。
机译:二维电子气上的供体样表面陷阱以及AlGaN / GaN HEMT的电流崩塌
机译:二维AlGaN / GaN基导电通道中热电子和自热效应的分离