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Engineering Solutions and Root-Cause Analysis for Light-Induced Degradation in p-Type Multicrystalline Silicon PERC Modules

机译:p型多晶硅PERC模块中光致降解的工程解决方案和根本原因分析

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摘要

We identify two engineering solutions to mitigate light-induced degradation (LID) in p-type multicrystalline silicon passivated emitter and rear cells, including modification of metallization firing temperature and wafer quality. Lifetime measurements on etched-back samples confirm that LID has a strong bulk component. Spatially resolved lifetime maps indicate that the defects responsible for LID are dispersed ubiquitously across the wafer. Reversibility of LID upon low-temperature annealing suggests a low-activation-energy barrier inconsistent with precipitated impurity dissolution. Lifetime spectroscopy of the LID-affected state reveals an asymmetry of electron and hole capture cross sections of , consistent with a deep-level donor point defect (e.g., interstitial Ti, interstitial Mo, substitutional W), charged nanoprecipitate, or charged structural defect, such as a dislocation. Finally, we explain two possible root causes of this LID, including 1) a point-defect complex involving a hydrogen atom and a deep-level donor and 2) configurational change of a point-defect complex involving fast-diffusing impurities.
机译:我们确定了两种工程解决方案来缓解p型多晶硅钝化发射极和后单元中的光致退化(LID),包括金属化烧结温度和晶片质量的修改。对回蚀样品的寿命测量结果证实LID具有很强的体积成分。空间分辨的寿命图表明,负责LID的缺陷在晶圆上无处不在。 LID在低温退火时的可逆性表明,低活化能势垒与沉淀的杂质溶解不一致。 LID受影响状态的终生光谱显示出电子和空穴俘获截面的不对称性,与深层施主点缺陷(例如,间隙Ti,间隙Mo,取代W),带电纳米沉淀或带电结构缺陷一致,例如脱臼。最后,我们解释了该LID的两个可能的根本原因,包括1)包含氢原子和深层供体的点缺陷络合物,以及2)包含快速扩散杂质的点缺陷络合物的构型变化。

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