Dammann gratings as integratable micro-optical elements created by laser micronanofabrication via two-photon photopolymerization

摘要

Dammann gratings, as beam splitters and coherent signal generators, were produced in a short fabricatingncycle by femtosecond laser fabrication via two-photon photopolymerization. These holograms that each gen-nerated 2u00012, 3u00013, 4u00014, 5u00015, and 6u00016 spot sources in the fan-out demonstrated diffraction efficiency ofn36%, 25%, 29%, 52%, and 49%, respectively, comparable with the theoretical values. This work shows thenpromising prospect of femtosecond laser fabrication in compatibly manufacturing various micro-optical de-nvices including Dammann gratings and their integrated systems. © 2008 Optical Society of America.