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首页> 外文期刊>The European physical journal. Applied physics >Ultraviolet self-generating relief micro-optical elements through crosslinking photopolymerization of liquid resins
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Ultraviolet self-generating relief micro-optical elements through crosslinking photopolymerization of liquid resins

机译:通过液态树脂的交联光聚合而产生的紫外线自生浮雕微光学元件

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摘要

The use of a self-processing dry photopolymer layer capable of memorizing optical information as a local change in thickness, is proposed for the fabrication of microlenses, binary holograms and gratings. Relief micro-optical elements are generated by direct imagewise exposure through a mask. A gradient of chemical composition and a gradient of surface free energy cause the transfer of reactive species between dark and illuminated areas. Contrary to conventional lithographic techniques that require wet chemical post-treatment to remove parts of the photoresist material, the fully self-processing character of this technique makes the record available in situ and immediately after exposure.
机译:已提出使用能够记忆光学信息作为厚度的局部变化的自加工干光聚合物层来制造微透镜,二元全息图和光栅。凸版微光学元件是通过掩模直接成像曝光而产生的。化学成分的梯度和表面自由能的梯度会导致反应性物质在黑暗和光照区域之间转移。与需要湿化学后处理以去除部分光致抗蚀剂材料的常规光刻技术相反,该技术的完全自处理特性使其可以在曝光后立即就地获得记录。

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